Main Article Content
A quasi-static approach based on two-dimensional Finite Element Analysis (FEA) is described to calculate the position and speed of the rotor of Variable Capacitance Micromotor (VCM). FEA is performed to compute the overall capacitance of the rotor-stator combination when the stator is excited symmetrically. A continuous curve is fit to energy-angle points by the spline interpolation technique that is very effective for data fitting. Thus the energy vs. angle function is obtained and the torque is calculated by the partial derivative of energy vs. angular displacement. A quasi-static approach is then adopted to the operation model of the entire micromotor. Also a new speed control method is presented which the rotor is rotated based on the torque estimated by extrapolating the earlier FEA result for a single stator pole. It can enable a sufficient fast and accurate way to dynamic simulation and control of VCM.
Liu W, Chen WY, Zhang WP, Huang XG, Zhang ZR. Variable-capacitance micromotor with levitated diamagnetic rotor. Electronics Letters. 2008;681-683.
Timothy C. Neugebauer, David J. Perreault, Jeffrey H. Lang, Carol Livermore. A six-phase multilevel inverter for MEMS electrostatic induction micromotors. IEEE Trans on Circuits and Systems. 2004;51(2):49-56.
Chapman PL, Kerin PT. Micromotor technology: Electric drive designer’s perspective. IEEE. 2001;1978-1983.
Al Wallash, Larry Levit. Electrical breakdown and ESD phenomena for devices with nanometer-to-micron gaps. Proc. SPIE. 2003;4980:87.
Tai YC, Muller RS. Frictional study of IC-processed micromotors. Sensors and Actuators. 1990;A21:180-183.
Stephen FB, Mehran M, Lee ST, Jeffrey HL, Stephen DS. Electric micromotor dynamics. IEEE Trans. Electron Devices. 1992;39(3): 566–574.
Rao NK, Hartsfield DK, Purushotham A, Garverick SL. An IC for closed-loop micromotor control. To be Published in Proc. Inter. Symp. Sig., Sys., and Elec., San Francisco, CA; 1995.
Purushotham A, Garverick SL, Edwards C, Nagy ML. A closed-loop micromotor control system. Circuits and Systems. 1996;4:209-212.
Ketabi A, Navardi MJ. Optimization shape of variable capacitance micromotor using differential evolution algorithm. Mathematical Problems in Engineering; 2010.
Jindal A, Krishnamurthy M, Fahimi B. Modeling and analysis of a micro variable capacitance electromechanical energy converter. Power Electronics, Electrical Drives, Automation and Motion. 2006;358-363.
Wiak S, Barba PD, Savini A. 3-D computer aided analysis of the “Berely” electrostatic micromotor. IEEE Trans Magn. 1995;31(3): 2108–2111.
Sujay S. Irudayaraj, Ali Emadi. Micromachines: Principles of operation, dynamics, and control. IEEE International Conference on Electric Machines and Drives. 2005;1108-1115.
Barba PD, Savini A, Wiak S. 2-D numerical simulation of electrostatic micromotor torque. Proceedings of the 2nd International Conference on Computation in Electromagnetics. 1994; 227–230.
Milne NG, Yang SJE, Sangster AJ, Ziad H, Spirkovitch S. Determination of the forces present in an electrostatic micromotor. Electrical Machines and Drives. 1993;9–14.
Johansson TB, Van Dessel M, Belmans R, Geysen W. Technique for finding the optimum geometry of electrostaticmicromotors. IEEE Transactions on Industry Applications. 1994;30(4):912–919.
Bart SF, Lober TA, Howe RT, Lang JH, Schlecht MF. Design considerations for microfabricated electric actuators. Sensors and Actuators. 1988;14(3):269-292.
Ketabi A, Navardi MJ. Optimization shape of variable-capacitance micromotor using seeker optimization algorithm. Journal of Electrical Engineering and Technology. 2012;7(2):212-220.
Rabinowicz E. Friction and wear of materials. New York: Wiley; 1965.
Pao WKS, Wong WSH, Lai AMK. An explicit drive algorithm for aiding the design of firing sequence in side-drive micromotor. Communications in Numerical Methods in Engineering. 2008;24(12):2131-2136.